研制了一种基于微机电系统（ MEMS）技术的微型阵列式推进器，并开发了记录其点火过程的音频采集系统。该推进器利用金属溅射、体硅干法刻蚀等工艺制作点火电阻和燃烧室，完成了点火电阻、引线以及焊盘的一体化加工，利用硅-玻璃阳极键合工艺完成燃烧室和点火电阻的封装，并采用硅微麦克风捕获点火过程产生的音频信息。结果表明：MEMS阵列式推进器尺寸为8．8 mm×8．8 mm，采用5 V低电压供电实现推进器点火，功率约为900 mW，由捕获的音频信息可知，点火过程大约持续了40μs。作为皮卫星的有效载荷，满足飞行任务需求。%Based on micro-electro-mechanical system ( MEMS) technology, micro array thruster was designed and ignition process was recorded by audio acquisition system. Metal sputtering and dry etching process were utilized to form igniter and combus-tion chamber,respectively.The integrated ignition resister,wires and pads were fabricated.A reliable silicon-glass anodic bonding be-tween combustion chamber and igniter was then formed.Silicon microphone was utilized to capture audio signal produced during pro-pellant combustion. Test results show that size of MEMS array thruster is 8.8 mm×8.8 mm and 5 V DC low voltage meets ignition demands.Ignition power is estimated to be 900 mW.Captured audio data show that ignition process lasts about 40μs.The audio sys-tem,as the payload of pico satellite, meets demand of flight.
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