基于平面光栅的二维移动测试方法研究

摘要

Two-dimensional micro-platform is often indispensable to equipment or experimental technology of a kind of common device .The standardization of the mobile platform often limits its precision so that it is hard to meet some top applications .This paper introduces a two-dimension plane grating moving test platform whose moving resolution is fixed .In order to improve the movement accuracy of the mobile platform in both directions , the calibration and testing methods between the plane grating and two -dimensional mobile platform are presented .The experiment shows that the application of plane grating can improve the display accuracy of mobile platform, and the precision calibration method is reliable .%二维微动平台往往是装备或实验技术中不可或缺的一种常见装置，而标准化的移动平台往往精度有限，难以满足某些高端应用场合。本文采用平面光栅对二维移动平台进行测试，在平台的移动分辨力固定的情况下，介绍了平面光栅和二维移动平台相结合时的标定和测试方法，从而提高二维移动平台的移动准确度。实验结果表明，平面光栅的应用可以提高二维移动平台的准确度，所采用的标定方法稳定可靠。