This paper presents a method of rapid machine tool error modeling, separation, and compensation using grating ruler. A ro-bust modeling procedure for geometric errors is developed and a fast data processing algorithm is designed by using the error separa-tion technique. After compensation with the new method, the maximum position error of the experiment workbench can be reducedfrom 400 μm to 15 μm. The experimental results show the effectiveness and accuracy of this method.
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