The micro-Raman spectroscopy has the advantages of the sensitivity of vibration and rotation energy in lattice and molecule, as well as the non-destructive feature. In the research of microelectronics, an in situ and non-contact measurement method is needed to study crystallinity, stress and thermal properties of varied materials and devices. The micro-Raman spectroscopy becomes an effective method to those studies. In this paper, we use both survey and experiment to investigate the details of the applications of micro-Raman spectroscopy, which has been applied to silicon and carbon materials, as well as merging methods based on micro-Raman spectroscopy. According to numerous previous reports, micro-Raman spectroscopy will have even more extensive applications with the development of the microelectronics.%拉曼光谱对被测样品的晶格与分子振动、转动能量非常敏感,而且拉曼光谱的测量具有非破坏性在微纳电子学研究中,需要原位的、高空间分辨率的、非接触的测量方法研究各种材料、器件的晶态、应力热学性质等参数.由此,显微拉曼光谱术就成为一种能够满足上诉要求的、实现多种参数测量的重要的手段.本文通过调研和实验研究了显微拉曼光谱术在硅、低维碳纳米材料等的晶态、应力、热学等研究领域的具体应用,以及一些新出现的研究手段.从大量的相关报道不难看出,显微拉曼光谱术在微纳电子学的进一步发展中将会有更为广泛和深入的应用.
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