微V形槽玻璃元件模压成形有限元应力分析

摘要

Due to the large residual stress existing in micro-structure optical elements after GPM,the glass material D-ZK3 with low transition temperature was selected,and a finite element simulation model of micro V-grooves was developed with the software MSC.Marc.Five-element general Maxwell model was used to describe the viscoelastic properties of D-ZK3 glass at high temperatures,and the fill effect and stress distribution of micro V-grooves were simulated and analyzed under different molding parameters.The simulation results show that the maximum stress increases and filling effects are improved when the V-groove angle increases;the higher molding speed leads to higher maximum stress and molding pressure;whereas the maximum stress decreases with the increasing of molding temperature.%针对微V形槽结构光学元件在模压后存在应力过大等问题,选取D-ZK3型低温光学玻璃,利用MSC.Marc软件建立了微V形槽的有限元仿真模型.采用5个单元的广义Maxwell模型来描述高温下D-ZK3玻璃的粘弹性特性,对V形槽结构在不同模压条件下的填充效果和应力分布进行了仿真研究分析.结果表明:V槽角度越大,填充效果越好,但最大应力也越大;模压速度增大将导致应力和模压力的增大;模压温度增大将导致最大应力的减小.