光学针描法表面粗糙度测量及其关键技术处理

摘要

A new roughness measurement technique by optical probe has been presented in this paper. The principle of the new method is based n the intensity of light beam modulated by surface profile. In the measurement system, process-control of measuring, data sampling and processing and the output of the measurement results are completely performanced by computer. The modulation principle, the design of fiber probe, data processing technique and experiment results were detailed in this paper.%介绍了一种基于光纤传感技术的光学针描法粗糙度测量技术．它根据微观表面轮廓对光信号的调制原理，采用计算机技术进行测量控制、数据采集与处理，从而实现对表面粗糙度各常用参数的测量，并给出被测表面的轮廓图形．文中对有关测量原理及其关键技术进行了介绍，给出了实验结果及误差分析．