Stresses due to thermal mismatch between substrate, interlayer and coating developed in WS2 soft coatings when cooled down to room temperature from deposition temperature. Two finite element models （FEM） were established to simulate and analyze thermal mismatch stress. Results show that mismatch of elastic modulus and coefficient of thermal expansion is significant to residual thermal stresses, while Poisson＇s ratio has little influence on them. WS2 coatings were deposited by medium-frequency magnetron sputtering technique, multi-arc ion plating technique and ion beam assisted deposition technique on the selected substrates and interlayers. The properties tested proved the analysis of FEM and found that residual thermal stress had great influence on the properties of WS2 soft coated tools. Another result is that Zr interlayer was proved to promote the growing of WS2 Ⅱ texture.%运用有限元软件分析了不同基体材料和过渡层的基体表面WS2软涂层的残余热应力。结果表明弹性模量和热膨胀系数等参数是影响涂层残余热应力大小的主要因素。采用中频磁控溅射、多弧离子镀外加离子束辅助沉积工艺制备了4种WS2软涂层刀具并对其性能进行了测试,分析结果符合有限元计算的结论,发现残余热应力对WS2软涂层刀具的性能产生很大的影响,并发现Zr过渡层能有效促进WS2Ⅱ型织构的生长。
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