基于共面去耦结构的空间三维电场测量方法

摘要

To deal with the issue of coupling between three components of electric field in measuring, this paper presents a new 3-D testing method based on coplanar decoupling structure. Different from the conventional testing method, which places sensing elements in three orthogonal directions of X, Y, Z, in the proposed method sensing elements are arranged un-collinearly in the same plane, and the demodulation of X, Y, Z components from three sensing elements is realized by utilizing an electric field coupling sensitivity matrix. A three dimensional electric field sample sensor is developed using MEMS chips as sensing elements. Furthermore, an innovative fixture is designed, which can realize the sensor rotation of any angle, and the corresponding calibration and testing system is built up. Experiments show that the proposed 3-D electric field sensor can realize the accurate measurement, and it has a simple structure. The coupling interferences among three electric field components are eliminated, which improves the measurement accuracy.%为了准确测量空间3维电场，解决作用于电场传感器的电场各分量之间的耦合干扰问题，该文提出一种新型的基于共面去耦结构的空间3维电场探测方法。区别于在空间的X, Y, Z 3个方向上进行3维布置传统测量思路，该文提出采用3个不共线的平面分布电场敏感单元，利用电场耦合灵敏度矩阵实现电场3个正交分量的准确解调。采用3个基于微机电系统(MEMS)技术的振动微结构电场敏感单元成功制作出3维电场传感器样机。该文设计出一种可实现任意角度旋转的新的传感器夹具，并构建了3维电场测试标定系统。实验表明，该文研制的3维电场传感器可实现电场3个分量的准确测量，结构简单，消除了3个电场分量之间的耦合干扰，提高了测量精度。