X射线定向仪衍射角度自动测量与采集系统研制

摘要

An automatic measurement system to realize the crystal diffraction angular surveying , acquisition , storage and export through the automatic peak search technology for traditional X -ray crystal orientator was devel-oped .By such a system , the error happened in manual operation of traditional orientator can be eradicated and the uniformity in chip screening process can be greatly improved .The results of experiments and user ’ s reports show that the measurement error of the revised orientator can be superior to ±10 seconds , far below the permissible ±30 seconds error of the traditional orientator .%在传统X射线晶体定向仪的基础上，设计了一种可以通过自动寻峰技术，实现晶体衍射角度测量、采集、存储和导出的自动化测量系统。有效地解决了传统定向仪手动测量过程中的人为误差，并极大地提高了在晶片筛选中的一致性。试验及用户使用报告证明，使用该系统的X射线定向仪，测量误差可优于±10″，远低于传统定向仪的±30″允许误差。可广泛应用于单晶的晶片筛选及硅单晶的切割定向。