基于正交试验方法的相邻电容传感器优化设计

摘要

基于正交试验方法，针对极板面积固定与极板面积不固定的双极板相邻电容传感器分别进行了参数设计实验，并分析各参数对传感器信号强度的影响。引入正交试验设计方法提高实验效率达33%，并能有效分析各设计参数对传感器信号强度影响的主次性。实验结果表明：相邻电容传感器设计参数对极板面积固定的传感器性能影响权重由高到低为间距宽度比、极板长宽比、激励频率；极板面积不固定的传感器影响权重依次为极板间距、极板长度、极板宽度、激励频率。利用COMSOL进行数值仿真，与实验测量结果吻合。%According to the double-plate proximity capacitance sensor with the same area and different area electrodes, the orthogonal test was proposed to optimize the design of the sensor, and the influence of the sensor parameters was analyzed, respectively. This experiment was feasible, the efficiency of experiment could be improved to 33%, and the importance of parameters affecting sensor signal intensity was effectively analyzed. Results show that the parameters in order of important influence are spacing-width ratio, length-width ratio and excitation frequency with the same area electrode and the spacing, length, width and excitation frequency with different area electrodes. Experiment results agree well with the results of numerical simulation using the COMSOL.