三维超分辨光瞳滤波器的优化设计

摘要

利用matlab优化工具箱,采用非线性规划,对三区振幅型(透过率为1-0-1)和三区位相型(相位角为π-0-π)光瞳滤波器进行三维超分辨优化设计,建立了优化模型,经计算机多次迭代运算,改变斯特尔比s值,给出了优化结果.结果显示:所设计的滤波器较好地实现了横向和轴向三维超分辨,且轴向超分辨能力优于横向;相同斯特尔比下,位相型三维超分辨能力优于振幅型,并且这两种滤波器结构简单,容易实现.%Three-zone amplitude-type superresolution pupil filters (1-0-1) and three-zone phasetype superresolution pupil filters (π-0-π) are designed with Matlab optimization toolbox and non-linear programming. The optimal model is established and some examples of optimization are given. The optimization results show the both filters have preferable 3-D superresolution characteristics, the axial resolution is better than transverse resolution, and the phase-type resolution is better than amplitude-type resolution at the same Strehl ratio. The structures of the both filters are simple and easy to be implemented.