This paper presents a method of establishing simplified equivalent circuit model of traveling wave ultrasonic motor by using 1/2 wavelength stator with the similar vibration characteristics. Combined with the vibration mode characteristics of the composite stator, the method utilizes Hamilton principle to obtain precise solution of the simplified equivalent circuit. The model shows the mechanism of ultrasonic motor, considering the influence of non-axisymmetric vibration mode, tooth outline, anisotropy of PZT (Piezoelectric ceramic), etc. With this method, various electric parameters corresponding to different vibration modes, such as static capacitance, dynamic capacitance, dynamic inductance, dynamic resistance, equivalent input impedance, etc., can be solved. Experiments show good agreement with theoretical results.
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