应用于振动扫描的碳化硅反射镜设计与分析

摘要

针对光电系统中常用的振动扫描反射镜进行了结构设计技术研究.采用碳化硅材料,设计了反射镜的支撑方式,确定了反射镜轻量化孔的形式.使用ANSYS软件对反射镜分别进行了静态和动态面型变化仿真分析,并利用最小二乘法对变形后的反射镜面进行了平面拟合,分析了变形误差.对常用的几种反射膜进行了对比分析.最后对实际使用的反射镜进行了面形检测,实际成像质量表面反射镜可以满足使用要求.%The structure of vibration and scanning mirror in electro-optical systems is analyzed and designed. Using silicon carbide materials, the supporting mode of the mirror is designed and the size of lightweight hole is confirmed. Static and dynamic analysis of the mirror is carried out by the ANSYS software. The mirror surface is fitted by the least square method. The surface error and the moment of inertia of the mirror is analyzed. Several kinds of reflective films are compared and analyzed. Finally, the surface error of the mirror is tested, and the actual image quality shows that the mirror can meet the requirements.