适应于快速热处理设备的温度测量与控制系统设计

摘要

This paper proposes a temperature measurement and control system design for a rapid heat treatment system.Firstly,the working principle and key technology of the rapid heat treatment are introduced.Second,some advanced solutions that deal with these keys technology are proposed.Afterwards,these solutions that are a temperature measurement technique that based on enhanced reflex and emissivity measurement and compensated online and a temperature control that based on system model for MIMO system are detailed introduced.Finely,the temperature measurement and temperature control system is implemented and evaluated by simulation as well as experimental equipment.%提出了一种适应于快速热处量设备(RTP)的温度测量与控制方法.介绍了快速热处理设备工作原理和主要关键技术;针对温度测量与温度控制两大关键技术,提出了先进的解决方案,即一种增强反射及发射率在线测量与补偿的温度测量方法和基于系统模型多输入多输出(MIMO)温度控制方法;通过实验验证了该温度测量方法和温度控制方法的可行性与先进性,并将该温度测量与温度控制系统应用于我们自主研发的快速热处理设备上,证明该温度测量与控制系统完全能满足设备的各项工艺指标.