高通量中性原子氧束流的发生与控制

摘要

采用微波同轴耦合氧气放电产生高密度氧等离子体, 经磁场约束后与一施加负偏压的金属板碰撞复合并反射, 得到通量在1013～1016atoms*cm－2*s－1范围可控、动能约为6～10eV的中性氧原子束流。用双探针技术对生成的氧等离子体进行了诊断测量。根据聚酰亚胺在原子氧作用下的剥蚀率对原子氧束流进行了标定测量。%In order to simulate the errosion effects of low earth orbital atomic oxygen and study the modification effects of atomic oxygen with materials surface,an atomic oxygen beam with flux in 1013～1016atom/cm2*s and energy in 6～10eV has been developed by means of microwave coaxial coupling discharge of molecular oxygen plus magnetic confine and collision and reflection with a biased metal target. The produced oxygen plasma has been measured by double probe technique. The obtained oxygen beam has been calibrated by measuring the reaction rate of kaptan with the beam. The results shows that an atomic oxygen beam with flux in 2×1016 atoms*cm－2*s－1 and energy in 6～20eV can be obtained by this facility．