根据高功率准分子激光主振荡器功率放大系统像传递结构特点,利用LABVIEW与MATLAB相结合设计了靶面光斑重心的稳定性模拟仿真及分析软件.对光学元件稳定性测量结果和光学元件误差分配结果进行模拟仿真和验证,经过多次再分配实现了系统误差分配的最优化.数据表明,现有实验室条件下,靶面光斑重心稳定性尚不能满足要求;在保持低稳定性指标要求光学元件一定裕量前提下,高稳定性要求光学元件的最优化分配指标为1.7 μrad;实验室现有光学元件在工作条件下能够满足该优化分配指标,在一定程度上减小了对光学元件的结构要求.%Based on characteristics of image-relaying structure in high power excimer MOPA laser system, simulation and a nalysis software of targeting beam's barycenter stability was designed by using LABVIEW and MATLAB. Simulation was made to measured results of every optical component in laboratory environment. Simulation and validation of budget values for optical components was and optimization of error budget of system was accomplished via post-allocation for several times. It is shown that targeting beam's barycenter stability in the condition of current laboratory environment can't satisfy needs and index of high demand optical components can be allotted to 1. 7 μrsd when index of low demand optical components have some stability margin. These results can provide a guide to construction of system and design and machining of optical components and optimization of system. Optical components of laboratory on work can satisfy optimized distributed index, which reduce the demand of structure to some extent.
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