Aiming at the difficulties and high-precision detection demand for assembly error inspection of micro-capsule in inertial confinement fusion(ICF) device, the measurement system for assembly parameters detection of laser target is developed. A compound measuring method based on laser probe and CCD is proposed. The mathematical model for data fusion of the compound probe is established by calibrating their spatial location relationship. Thus, high-precision 3D inspection is realized. The inspection method of micro-capsule assembly error is discussed in two cases. The experimental results demonstrate the validity of these two approaches. Furthermore, the measurement precision of such two approaches is compared and their limit errors are both within 3 μm.%针对激光惯性约束聚变装置中靶丸装配误差检测困难、要求精度高的特点,研制了一套用于微靶装配参数检测的测量系统.提出了一种基于激光与CCD的复合式测量方法,建立了二者数据融合的数学模型,通过标定空间位置关系有效地把二者的测量数据融合到同一个坐标系中,从而实现了高精度三维测量.分两种情况讨论了靶丸装配误差的检测方法.实验结果验证了这两种方法的可行性,并比较了两种方法的测量精度,其极限测量误差均不超过3μm.
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