投影光刻机中PDP-11主控制计算机系统的替换

摘要

Introduced for the early Step-and-Repeat lithography machine there PDP-11 computer is slow,difficult to control system operation problem,the use of ordinary PC through the GPIB card replaced the PDP-11 computer,using programs written in VB language replaced the main control system program.%介绍了针对早期的投影光刻机存在PDP-11计算机速度慢,控制系统难操作的问题,利用普通PC机通过GPIB卡替换了PDP-11计算机,使用VB语言编写的程序替换了主控制系统程序。