直线电机保护装置的设计与控制方法

摘要

直线电机具有精度高、响应快等优点，广泛应用于半导体制造设备中。直线电机控制机构Z向运动时，经常出现掉电或故障导致的电机动子跌落而发生损坏晶圆的情况。利用电磁铁螺线管设计了一种电机掉电保护装置，建立动力学模型，应用Adams软件进行了动力学仿真，获得了挂钩转角与时间的关系曲线，并通过搭建实验平台，测试了该系统的反应时间。实验表明，反应时间的仿真与实验结果吻合较好，该装置可以应用于直线电机保护中。%Linear motors have advantages of high precision,fastly response etc.,so widely used in semiconductor manufacturing equipment. Linear motor control mechanism to move Z direction movement,often damaged wafers by motor mover falling down or some failures. In this paper, designed of a power-off protection device using the solenoid electromagnet ,establishment of dynamic model,application of software Adams to dynamic simulation,won the curve of hook angle and time, then built experimental platform to test response time of the system. Experimental results show that the response time of the simulation agree well with the experimental results ,and the device can be applied to the protection of linear motor.