利用高速、高精激光微位移传感器及高频数字示波器进行超声及其复合加工的振动参数（振幅与频率）在线测量，其结果具有高精度和实时性。设计了控制软件，为保持超声振动的稳定及复合电加工参数的在线实时调节与优化建立了基础条件，同时通过数学处理得到了超声振幅与超声激振电压之间的关系。利用分析与测试结果合理选择加工参数，对陶瓷、硬质合金等硬脆性难加工材料进行了超声及其复合电加工试验，超声振动系统工作稳定可靠，试验结果验证了超声及其复合电加工技术对硬脆难加工材料的加工优势。%The measuring results are with high accuracy and timeliness by high-speed ,high-precision micro-displacement laser sensor and high-frequency digital oscilloscope online measured ultrasonic vibration parameters (amplitude and frequency). Development control software can provide basic conditions for maintain the stability of the ultrasonic vibration and compound electric machining parameters on-line in real time to adjust and optimization. At the same time ,the relationship between ultrasound amplitude and ultrasonic excitation voltage is obtained by mathematical treatment. Meanwhile,the working stability of ultrasonic vibration system and technical advantages of ultrasonic compound electrical machining method are verified by using the results from analysis and tests , choosing processing parameters reasonably ,testing ultrasound machining and ultrasonic compound modulation electric machining on ceramics ,carbide and other hard and brittle difficult materials.
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