基于阻抗控制的硬脆材料阵列微小孔超声加工研究

摘要

The control strategy of ultrasonic machining based on equivalent impedance is elaborated and the experimental platform is built. Research on micro hole array machining in hard-brittle materials such as glass and zirconia by ultrasonic machining was carried out. The experimental results show that the equivalent impedance can be used to indirectly reflect the machining state. The initial value of the equivalent impedance threshold of different materials is different. And with the increase of the hole depth,the equivalent impedance threshold also needs timely adjustment to ensure the stability of machining.%阐述了基于阻抗的超声加工控制策略,构建了实验平台,并以玻璃、氧化锆等硬脆性材料为对象开展阵列微小孔超声加工研究.实验结果表明:等效阻抗可用来间接反映加工状态,不同材料的等效阻抗阈值的初值不同,且随着孔深的增加,等效阻抗阈值也需适时调整,才能保证加工的稳定.