大功率激光光路环境控制装置设计

摘要

Cleanliness, temperature and relative humidity in laser paths have an important impact on the trans⁃mission and emission of high power laser. The non-absorbed gas-filled method is not suitable for the structure with thinner cavity wall, optical window and rotating joint. According to the characteristics of laser paths structure, a con⁃trol device of laser path environment is designed. Gas-filled controller is used to collect the parameters of pressure difference, temperature difference, relative humidity and cleanliness to turn on and turn off the electronic control valve and air evacuation electromagnetic valve automatically. Through charging high pure nitrogen and liquid nitro⁃gen automatically to discharge the original gas and keep the pressure difference in a reasonable range, the control⁃ling of cleanliness, relative humidity and temperature in laser path environment is realized. And the transmission quality of high power laser beam is ensured.%光路内环境的洁净度、温度、相对湿度对大功率激光的传输、发射会产生重要影响，采用充入非吸收气体的方法不适用于腔体壁厚较薄、含有窗口和旋转关节的结构，针对光路结构特点，设计了激光光路环境控制装置，采用充气控制器采集压差、温差、相对湿度及洁净度参数，自动控制电控球阀与排气电磁阀的启闭，通过自动充排气充入高纯氮气、液氮，排出原有气体，并保持压差在合理范围内，实现了对光路内环境的洁净度、相对湿度和温度的控制，保证了高能激光光束的传输质量。