Experimental Research of Dynamic Response of Laser-Induced Film-Substrate System

摘要

Film-substrate’s interfacial bonding strength is closely related to film quality. An excellent interfacial bonding strength is the premise for the well use of film. The laser detecting technique of discrete scratches based on laser shockwave effect is a new method, which can measure interfacial bonding strength. With this technique, film-substrate system is of transient load of different laser energy, the relation between the dynamic response characteristics of such film-substrate system and film-substrate’s interfacial bonding strength is a core problem to be solved urgently. On this basis, this paper conducted research on the dynamic response characteristics of film-substrate system during laser loading process using detecting technique of PVDF patch sensor. Results show that under the irradiation of different laser energy, it can detect dynamic responses of theory models of different film-substrate system using PVDF patch sensor, wherein shockwave dynamic response and dynamic strain response are included. Laser energy and interfacial bonding strength are of a regular influence to the dynamic response of film-substrate system theory model.