The Design and Its Application of Cross-Coupled Controller in X-Y Table

摘要

In conventional cross-coupled controller design,the method usually ignored the inherent characteristic of time-vary- ing parameters and model uncertainties in system.In this paper,a cross-coupled controller(CCC)using an H~∞control scheme has been proposed to reduce the contouring error for an X-Y table.Furthermore,the proposed CCC design,which is a typical Multi- Input Multi-Output(MIMO)system with linear time varying(LTV)characteristics,has been verified as being internally stable. The simulations are carried on Matlab simulink to verify the proposed method,and the results showed that the proposed method can reduce the contouring error significantly compared with the conventional one.