TEM and TEM-EDX Analysis of Cross-section of TiO_2Thin Film and Glass Substrate

摘要

TiO2 thin film was deposited on Na-Ca-Si glass substrate by sol-gel process. TEM observation showed that the film is compactly joined to the substrate. TEM-EDX analyses of the film, film-substrate interface, and substrate revealed that the diffusion of Na+ from the substrate to the film is negative diffusion.