首页> 中文期刊> 《中国机械工程学报:英文版》 >NEW SELF-MIXING MICRO-INTERFEROMETER BASED ON EXTERNAL PHASE MODULATION

NEW SELF-MIXING MICRO-INTERFEROMETER BASED ON EXTERNAL PHASE MODULATION

             

摘要

ASeblsf-tmraicxti:n gA innteewrf esreelnf-cme ioxcincgu rms iicnr oa -liansteerrf derioodmee t(eLrD b)a sbeyd r eofnl eecxtitnergn tahl ep lhiagshet fmroomdu ala tmioinrr oisr-plirkees etanrtgedet. in front of the laser. Sinusoidal phase modulation of the beam is obtained by an electro-optic crystal (EOC) in the external cavity. The phase of the interference signal is demodulated by Fourier analysis method. The combination of the modulation and demodulation decreases the sensitivity of the instru-ment to fluctuations of the laser power and the noise induced by environment. Experimentally, the new micro-interferometer is applied to measure the micro-displacement of a high precision commer-cial PZT with an accuracy of <10 nm.

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