Robust iH/isub∞/subController for High Precision Positioning System, Design, Analysis, and Implementation

摘要

In this paper, a systematic robust control design and analysis for a single axis precise positioner is presented. The effects of uncertainties on closed-loop stability and performance are considered in the H∞ robust controllers design. v-gap metric is utilized to validate the intelligently estimated uncertainty. The robust controllers are formulated within the frame- work of the standard H∞ mixed sensitivity optimization problem. Furthermore, a specially designed integral-H∞ and two-degree-of-freedom 2 DOF H∞ controllers are developed to provide improved robust performance and resolution properties. It is shown that the proposed design schemes are very effective for robust control and precise tracking performance of the servo positioning system.