化学溶液沉积法制备YBCO薄膜的快速分解工艺研究

摘要

文中对化学溶液沉积法快速制备YBCO薄膜的工艺进行了探索.通过对分解工艺的优化,成功将薄膜的干燥分解时间缩短到1小时以内,而传统工艺则需要10小时以上的处理时间.以快速分解工艺成相的YBCO薄膜的X射线衍射、扫面电镜和物性测量结果表明薄膜具有良好的c轴外延织构,表面微观形貌平整致密,临界超导转变温度(Tc)为92K.%Quick decomposition process in the preparation of YBCO superconducting film by chemical solution deposition (CSD) method was investigated in this paper. With an optimized process, the drying and decomposing process could be achieved within 1 hour, which is much less than 10 hours needed in traditional route. Resulted from X-ray diffraction (XRD), scanning electron microscopy (SEM) and the physical properties measurement, the growth YBCO film with a quick decomposition process had a good texture, a smooth and dense surface, and a higher superconducting transition temperature Tc of 92K.