微电子工业园区谐波分析方法研究

摘要

The main harmonic generation equipment in microelectronics industrial park and their harmonic effect were analyzed. Aiming at the harmonic analysis method, adopting the fast Fourier transform algorithm of complex sequence and the phase lock control to overcome shortcomings of the traditional FFT algorithm was proposed. Through taking the measured data from a company in the microelectronics industrial park as an ex-ample, the harmonic analysis of them was carried out.%对微电子工业园区主要谐波产生设备和谐波影响进行了分析,针对谐波分析方法,提出了采用复序列快速傅里叶变换算法并进行锁相控制,以克服传统FFT算法的缺点,并以微电子工业区某企业实测数据为例进行了谐波分析.