高效过滤器DOP（PAO）检漏法在洁净室中的应用

摘要

This paper baseds on No.5.6.1-No.5.6.13 rules of The Code for Consturction and Acceptance of Cleanroom and the appendix D. And it introduces the leak thory ,leak test, judgments of the rusltes of the heat filter DOP（ PAO ）of clean room.Meanwhile,it also dissuces the differences of filter and standard of DOP（PAO）.%根据GB50591—2010洁净室施工及验收规范中5．6．1-5．6．13及附录D的要求，介绍洁净室中的高效过滤器DOP（PAO）检漏的原理、检测方法、结果判断及处理、检漏周期等内容，并对DOP（PAO）检漏及其标准间的差别的有关问题进行了探讨。