The process of low-energy electron scattering (LEES) in solids is described by using astrict theory, and a direct simulation method proposed in this paper. Pendry’s method basedon the partial-wave expansion has been improved, which can be employed to calculate theelastic scattering between an electron and atoms. The contributions of shell electrons, con-ductive electrons and plasma excitations are considered in the calculation of the inelasticscattering; electron scattering and cascade process of secondary electrons are simulated by theMonte Carlo method. The secondary electron yields, the energy spectrum curve and thebackscattering electron coefficients for Cu are evaluated at the various energies, and thetheoretical results are in agreement with Kashikawa’s experiments.
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