Tribological investigations of sol-gel ceramic films

摘要

Tribological properties of the TiO2, doped TiO2, AI2O3 and SiO2 thin films prepared by different sol-gel processes are reported. The results indicate that doping deteriorates the wear resistance of TiO2; organic modifier can improve the tribological property of AI2O3 significantly; and the SiO2 film prepared from inorganic salt sodium silicate registers much better wear resistance than that from ethyl orthosilicate.