State;
Key;
Laboratory;
for;
Integrated;
Optoelectronics;
Institute;
of;
Semiconductors;
Chinese;
Academy;
Sciences;
Beijing;
100083;
School;
Information;
and;
Communication;
Tianjin;
Polytechnic;
University;
300160;
工艺设备; CMOS; 硅化物; 低电压; 硅发光; 标准; 排放性能; 金属氧化物;