机译:不同厚度SiNx钝化的AlGaN / GaN高电子迁移率晶体管的电应力可靠性和电流崩塌
Key;
Laboratory;
for;
Wide;
Band-Gap;
Semiconductor;
Materials;
and;
Devices,;
School;
of;
Microelectronics,;
Xidian;
University,;
Xi'an;
710071,;
China;
高电子迁移率晶体管; AlGaN; 电流崩塌; 钝化层; 氮化硅; 可靠性; 电应力; 厚度;