GaN samples 1-3 are cleaned by a 2:2:1 solution of sulfuric acid(98%) to hydrogen peroxide(30%) to de-ionized water;hydrochloric acid(37%);or a 4:1 solution of sulfuric acid(98%) to hydrogen peroxide(30%).The samples are activated by Cs/O after the same annealing process.X-ray photoelectron spectroscopy after the different ways of wet chemical cleaning shows:sample 1 has the largest proportion of Ga,N,and O among the three samples,while its C content is the lowest.After activation the quantum efficiency curves show sample 1 has the best photocathode performance.We think the wet chemical cleaning method is a process which will mainly remove C contamination.
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