The 4H-SiC junction barrier Schottky(JBS) diodes terminated by field guard rings and offset field plate are designed,fabricated and characterized.It is shown experimentally that a 3-μm P-type implantation window spacing gives an optimum trade-off between forward drop voltage and leakage current density for these diodes,yielding a specific on-resistance of 8.3 mΩ·cm^2.A JBS diode with a turn-on voltage of 0.65 V and a reverse current density less than 1 A/cm^2 under 500 V is fabricated,and the reverse recovery time is tested to be 80 ns,and the peak reverse current is 28.1 mA.Temperature-dependent characteristics are also studied in a temperature range of 75°C-200°C.The diode shows a stable Schottky barrier height of up to 200°C and a stable operation under a continuous forward current of 100 A/cm^2.
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机译:利用扫描穿隧显微镜探讨在硒化铟上未氧化表面和氧化表面之介面接合处的电子特性 =Scanning Tunneling Microscope study of InSe Surface Electronic Properties at the Fresh/Oxided Interface Junction