半导体氧化物气敏材料的电导振荡特性研究

摘要

This paper approaches and analyzes conductance oscillatory characteristic for gas sensitive material of semiconductor oxide. The necessary condition of oseillation has been found by experiment and investigate. The principle, technology and structure of conductance oscillating type gas sensitive element have been investigated and explained. At the same time，gas sensitive characteristic of semiconductor oxide was summarized for the normal temperature and some issue should to be solved，which．Was pointed out also。%本文对半导体氧化物气体敏感材料的电导振荡特性加以研究分析，通过试验与理论分析得出气敏电导振荡的必要条件，并对电导振荡型气体敏感元件的原理、工艺技术和结构等进行分析说明。同时，对半导体氧化物气体敏感材料的常温气体敏感特性进行归纳总结，指出其优缺点和需要解决的问题。