A wireless passive thin-film temperature sensor is designed aiming at the requirements for surface temper-ature measurement. The sensor has a metal-patch based " sandwich " profile, which is fabricated with high temperature resistant HTCC( high temperature co-fired ceramics) zirconia and Ag metal layer. A high temperature resistant microstrip antenna is used to test the sensor under high temperature. The relationship between the return loss of the antenna and the frequency is read through a vector network analyzer. It is concluded that the resonant frequency of the sensor is decreased with the increase of the temperature,which is caused by the increased dielectric constant of the temperature-sensitive zirconia with increased temperature. The temperature measurement is achieved at 25℃~700℃,and the average sensitivity of the sensor is calculated to be 96.63 kHz/℃. The thin-film tempera-ture sensor designed in this paper has the advantages of high Q factor,low profile and simple structure.%针对恶劣环境表面温度测试需求,设计了一种基于微波后向散射原理的无线无源薄膜温度传感器.该传感器是金属贴片型的"三明治"结构,由HTCC氧化锆陶瓷和Ag金属层制备而成.采用耐高温微带天线进行测试,通过网络分析仪读取回波损耗和频率的关系,得出其谐振频率随温度升高而减小,是由氧化锆温度敏感介质的介电常数随温度升高而增大引起的,完成了感器在50 ℃~700 ℃的高温测试,平均灵敏度为96.63 kHz/℃,具有高Q值、外形小巧、结构简单的特点.
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