微型磁通门性能指标的综合测试与分析

摘要

Structural improvement of core is conducive to enhance the performance of the micro flux-gate sensor. The micro fluxgate based porous core was fabricated by MEMS technology. By testing and comparing main operational parameters and performance index,the influence of excitation current and excitation frequency on the sensitivity, linearity range,noise,remanence error and other performance indexes are analyzed. The experimental result provide data support for the sensor to choose appropriate operational parameters.%对铁芯结构的改进有利于提高微型磁通门传感器的性能,采用MEMS工艺制备了多孔铁芯结构微型磁通门,并对所制备的微型磁通门进行主要的工作参数和性能指标的综合测试,分析了激励电流和激励频率对灵敏度、线性范围、噪声、剩磁误差等性能指标的影响规律.对实验结果的分析结论为传感器选择合适工作参数提供了数据支持.