The elemental distribution within the large-dimension rare earth inclusion in steels was studied through analysis on plane distribution of elements by EPMA (Electron Probe Microanalyzer). The kinetics and mechanism of formation of RE inclusion were discussed, taking 5CrNiMo steel with the addition of RE and other microalloying elements as example. RE inclusions nucleate on oxides and sulphides with high melting point and grow up separately, then integrated by relatively high surface activity, which is a particular characteristic of RE elements, in liquid phase and during the course of solidification. Finally, the fine and dispersed RE inclusions merge and grow into a large-dimension one.
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