基于圆柱谐振腔结构的接近传感器研究

摘要

To satisfy the requirement of high accuracy measurement of proximity sensor used in precision robot vision, a novel proximity sensor designed based on the cylindrical resonator and TE011 mode is studied.The relationship between the proximity from sensor to target,the structure size of resonator and the operating frequency range is discussed by simulation.The simulation results show that the proximity measurement accuracy of this sensor is up to 1 |xm.This sensor almost dones not affect by environmental factors such as temperature, waste gases, dust and smoke.It can be used in the precision robot vision.%为满足精密机器人视觉应用中对接近传感器的高精度测量要求,研究了一种新型的接近传感器,该传感器是基于圆柱谐振腔和TE011谐振模而设计的.通过仿真研究了接近距离、谐振腔几何尺寸与工作频率之间的关系,结果表明,该传感器的距离测量精度可达1μm.该传感器不受温度、湿度、尘埃等环境因素影响,可用于精密机器人视觉中.