聚酰亚胺上催化剂增强化学气相沉积钯-铂双层膜

摘要

以N2和O2为载气,采用催化剂增强化学气相沉积法于聚酰亚胺上获得了Pt和Pd-Pt双层金属薄膜. 当使用Pd(hfac)2和PtMe2(COD)为前驱体,在同一反应器内共沉积时,只有Pt被沉积. 金属Pd和Pt顺序沉积可形成Pd-Pt双层膜.%Catalyst-enhanced chemical vapor deposition of Pt and Pd-Pt bilayer films on polyimide using N2 and O2 as the carrier gases was studied. When the mixture of Pt complex and Pd complex was used as precursors in the same chamber for co-deposition of Pd and Pt, only Pt was deposited. Sequential deposition of Pd and Pt metals formed Pd-Pt bilayer films.