辐流洁净室的建立与洁净度检测方法的研究

摘要

文章分析了辐流洁净室设计参数与建立的合理性，并探讨了在空态下辐流洁净室洁净度检测的具体参数与方法。%The article analyzes the design parameters and rationality of the establishment of vector flow clean room; explores the parameters and approaches of the vector flow clean room cleanliness detection in vacant state.