FBAR 振荡器作为六端口反射计射频源的 BAW传感器读出电路

摘要

为解决由于FBAR的谐振频率处于射频频段，导致BAW传感器读出电路难以实现的问题，将FBAR振荡器作为六端口反射计射频源，以检测FBAR谐振频率，从而实现BAW传感器信号读出的新型读出电路。在ADS软件中，通过建立FBAR的MBVD模型并采用Pierce拓扑结构实现FBAR振荡器的仿真模型，以及建立六端口反射计的仿真模型，并结合两个仿真模型建立BAW传感器的最小系统模型。 BAW传感器最小系统模型的仿真结果表明：由FBAR振荡器和六端口反射计实现BAW传感器读出电路的可行性。为实验验证该结构，搭建一个基于微带六端口网络实物的六端口反射计实验装置，准确地测得1个案例FBAR振荡器的振荡频率为1．5 GHz，该振荡频率就是传感器表头中FBAR的谐振频率。%Due to the resonance frequency of FBAR at RF frequency bands ,causing BAW sensor read -out circuit is difficult to be achieved .To solve this problem,a new type BAW sensor read-out circuit is proposed by using the six -port reflectometer to test FBAR oscillator frequency .In ADS software , the FBAR oscillator simulation model is established by using the MBVD model of FBAR and the topology of Pierce,as well as six-port reflectometer simulation model is established ,the minimum system model of the BAW sensor is established by these two simulation model .The simulation results of the minimum system model of the BAW sensor show that the read -out circuit of BAW sensor is implemented by using the FBAR oscillator and the six -port reflectometer based on six -port reflectometer is feasible .In order to experimentally validate this structure , a six -port reflectometer experimental setup based on a real microstrip six-port network is constructed ,and the oscillation frequency 1.5 GHz of a FBAR oscillator case is measured .This measured oscillation frequency is just the resonant frequency of the FBAR embedded in a sensor head .