光学镜面磁流变抛光误差的频谱特征与分布特性研究

摘要

通过分析磁流变抛光误差的频谱特征,发现严重影响成像质量的敏感频率成分误差,采用二维连续小波变换算法确定出敏感频率误差的具体分布区域,分析其演变特征及其与工艺参数之间的关系,为修正加工提供指导,以实现精确控制不同频率成分、不同分布区域光学加工误差和改善成像质量的目的.%In modern optical systems, the notable frequency error which influences imaging quality can be found by analyzing error spectrum in the process of magnetorheological finishing. The determinate distributing area of notable frequency error may be located by using two dimensional continuous wavelet transform, the evolving feature and the relation between optical errors and machining parameters are analyzed. The guidance is provided for surface correcting of optical mirrors, the errors with different frequencies and distributing areas will accurately be controlled, and the imaging quality can be improved.