微结构的精密微细铣削加工技术研究

摘要

The feasibility of precision micro - milling for microstructure in ultra - precision micro - milling was discussed.The different microstructure arrays with different scales on materials of polyvinyl chloride (PVC) are fabricated based on the ultra - precision micromilling technology using different kinds of milling tool, and the cutting performance are observed by the scanning electron microscope ( SEM ) and laser confocal microscope.%探讨在超精密微小型铣床上进行微结构的精密微细铣削的可行性,使用不同类型的微小刀具在高分子材料上成功的加工出不同的微结构阵列,使用扫描电子显微镜和激光共聚焦显微镜观察并分析了精密微细铣削加工的微结构阵列.