TWT微型折叠波导紫外激光微加工研究

摘要

Travel wave tube (TWT) is a kind of vacuum device. The slow wave structure becomes smaller and smaller with operating frequency toward THz. The main dimension of folded waveguide tend to micron and tolerances become unmanageable for conventional fabrication techniques. The fabrication techniques of slow wave structure is a key problem for development of high frequency TWT. The ultraviolet laser machining techniques is used for producing the interaction circuits on the substrate of glass wafer. The effect of micro folded waveguide with different laser frequency is analyzed.%行波管（TWT）是真空电子器件中的重要一类，正在向高频段乃至太赫兹频段发展。由于器件尺寸与工作波长的共渡性，导致随着频段的提高，高频慢波互作用结构的尺寸越来越小；当太赫兹频段时，折叠波导关键尺寸从毫米级减小到微米级，慢波结构的制造技术成为高频段行波管研发的关键技术之一。基于此，开展在玻璃wafer基体上采用紫外激光微加工技术制造微型慢波结构，文章对这种方法进行了初步探索，分析了不同频率下的激光光束对玻璃表面、盲槽底部、振镜接纹处和槽深宽的影响。