扩散硅压力传感器的高精度误差补偿算法

摘要

扩散硅压力传感器的传输特性受温度影响较大,必须采用某种手段将传感器的输入压力与温度进行解耦,从而实现对压力传感器输出的有效补偿,进而得到准确可靠的压力测量值.文中分析了一般扩散硅压力传感器的误差组成,针对误差提出了一个简单而又高精度的补偿模型,建立了有效算式,最后通过实例验证了算法的正确性,其精度可达到0.1％FS以下.%The transmission characteristics of diffusion silicon pressure sensor were influenced by temperature. In order to compensate the pressure sensor output effectively,and then get accurate and reliable measured pressure,some means must be used so that the input pressure and temperature sensors to achieve decoupling. A simple compensation model with high-accuracy was proposed to reduce the error based on the error composition analysis of the general diffusion silicon pressure sensor,and then also an effective formula. Finally the correctness of the algorithm was verified,and the accuracy of the algorithm was less than 0.1% FS.