立式靶丸AFM表面轮廓仪系统精度测试

摘要

研制了立式轴系结构靶丸AFM表面轮廓仪,对测量装置的精度进行了系统的测试.针对影响测量结果的不确定性因素,分别从气浮轴系回转误差、系统静态噪声误差以及综合测量误差几个角度开展实验研究.采用标准球及两步回转误差分离法获取了气浮轴系系统误差数据,在实际测量时作为系统误差进行消除.综合测量实验证明,该系统的测量噪声峰谷极差约22 nm,RMS为5.2 nm.%A capsule surface profiler system based on vertical spindle structure and atomic force microscope (AFM) was developed, and its systematic measurement tests were carried out. In order to evaluate the measurement uncertainty, the experimental studies mainly included the air-bearing spindle rotation run out error test, the system static noise test, and the comprehensive test. The rotary precision of air bearing was tested and the error curve of the spindle was obtained with a standard ball and two-step separation method. Further, this error curve was eliminated as in a systematic error. Comprehensive measurement tests of the system prove that the noise peak value of this system is about 22 nm and its RMS is about 5. 2 nm during the measurement process.