ZnO is a typical II-VI semiconductor oxide material,which has attracted wide attention from the scientific community because of its excellent optical,photonic and electronic properties.ZnO single crystal was irradiated with 350 MeV ^(56)Fe^(21)+ ions from the HIRFL(Heavy Ion Research Facility in Lanzhou),and was subsequently investigated by Raman spectroscopy.Figure 1 shows Raman spectra of incident and scattered light along the z axis of ZnO single crystal with/without ion irradiation.With the increase of irradiation dose,Vo gradually increases and gets the saturation state at 1×10^(14) ions/cm^(2).Figure 2 shows the Raman spectra of Vertical z axis of incident and scattered light of ZnO single crystal irradiated to 1×10^(14) Fe-ions/cm^(2) at different depths from the surface.It can be seen that a maximum Vo defect peak appears near the end of the ion range.The active Raman mode is represented by the corresponding vibration of the ion,and the red arrow indicates the movement of the dominant ion.
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